Humidity inzvimbo yakajairika yekudzora kwezvakatipoteredza mukushanda kwedzimba dzakachena. Iko kukosha kwehunyoro hwehukama mu semiconductor yakachena mukamuri inodzorwa kuti ive pakati pe30 kusvika 50%, zvichibvumira kukanganisa kuve mukati mechikamu chidiki che ± 1%, senge photolithographic area - kana kunyange idiki munzvimbo yekure ultraviolet process (DUV). - Mune dzimwe nzvimbo, unogona kuzorora kusvika mukati ± 5%.
Nekuti hunyoro hwehukama hune huwandu hwezvinhu zvinogona kubatsira mukuita kwese kwekamuri rakachena, kusanganisira:
● kukura kwebhakitiriya;
● Rudzi rwenyaradzo iyo vashandi vanonzwa patembiricha yekamuri;
● Static charge inooneka;
● ngura yesimbi;
● Kugadziriswa kwemhute yemvura;
● kuderedzwa kwe lithography;
● Kunwa mvura.
Utachiona nezvimwe zvinosvibisa zvipenyu (mold, mavhairasi, fungi, mite) zvinogona kuwedzera zvakanyanya munzvimbo dzine mwando unopfuura 60%. Mamwe maruva anogona kukura kana hunyoro hwehukama hunopfuura 30%. Kana hunyoro huri pakati pe40% ne60%, mhedzisiro yebhakitiriya uye hutachiona hwekufema hunogona kudzikiswa.
Hunyoro hunyoro muhuwandu hwe40% kusvika 60% zvakare ine mwero huwandu umo vanhu vanonzwa vakasununguka. Kunyanya kunyorova kunogona kuita kuti vanhu vanzwe kushushikana, nepo hunyoro huri pasi pe30% hunogona kuita kuti vanhu vanzwe vakaoma, varohwa, kusagadzikana kwekufema uye kusagadzikana mupfungwa.
Kunyorova kwakanyanya kunoderedza kuunganidzwa kweiyo static charge pamusoro pekamuri yakachena - ichi ndicho mhedzisiro inodiwa. Unyoro hwepasi hunonyanya kukodzera kuunganidzwa kwechaji uye inogona kukuvadza sosi yekubuda kwemagetsi. Kana hunyoro hwehukama hunopfuura 50%, iyo static charge inotanga kupera nekukurumidza, asi kana hunyoro hwehukama huri pasi pe30%, vanogona kuramba kwenguva yakareba pane insulator kana nzvimbo isina pasi.
Hunyoro hwehukama huri pakati pe35% ne40% hunogona kukanganisa kunogutsa, uye semiconductor cleanrooms dzinowanzoshandisa mamwe ma controls kudzikamisa kuunganidzwa kwe static charge.
Iko kumhanya kwemaitiro mazhinji emakemikari, kusanganisira iyo corrosion process, inozowedzera sezvo hunyoro hunowedzera. Zvose zvinoratidzwa nemhepo yakakomberedza imba yakachena zvinokurumidza kuvharwa neinenge imwe monolayer yemvura. Kana nzvimbo idzi dzakaumbwa nesimbi yakatetepa iyo inogona kuita nemvura, hunyoro hwepamusoro hunogona kukurumidza kuita. Sezvineiwo, mamwe masimbi, akadai aruminiyamu, anogona kugadzira oxide inodzivirira nemvura uye kudzivirira mamwe oxidation maitiro; asi imwe nyaya, yakadai semhangura oxide, haidziviriri, saka Munzvimbo dzakakwirira dzehunyoro, nzvimbo dzemhangura dzinonyanya kunetseka nekuora.
Mukuwedzera, munzvimbo yakakwirira yehunyoro hunyoro, iyo photoresist inowedzerwa uye inowedzerwa mushure mekubikira kutenderera nekuda kwekutorwa kwehunyoro. Photoresist adhesion inogonawo kukanganiswa nepamusoro pehukama humidity; yakaderera hunyoro hunyoro (inenge 30%) inoita kuti photoresist adhesion ive nyore, kunyangwe pasina kudiwa kwepolymeric modifier.
Kudzora hunyoro hwehukama mune imwe semiconductor yakachena kamuri haisi zvekutonga. Nekudaro, nekufamba kwenguva, zviri nani kuongorora zvikonzero uye hwaro hwemaitiro akajairika, anogamuchirwa kazhinji.
Humidity inogona kunge isinganyanyi kuoneka pakunyaradza kwedu kwevanhu, asi kazhinji ine simba guru pakugadzirwa kwekugadzira, kunyanya apo hunyoro hunenge hwakakwirira, uye hunyoro hunowanzove hutongi hwakaipisisa, ndicho chikonzero Mukutonga kwekushisa uye kunyorova kwekamuri yakachena, hunyoro hunosarudzwa.
Nguva yekutumira: Sep-01-2020